Reducing Edge Chipping of Micro-holes with Electrophoresis-assisted Micro-ultrasonic Machining
نویسندگان
چکیده
منابع مشابه
An Experimental Investigation on Surface Roughness and Edge Chipping in Micro Ultrasonic Machining
Surface quality including surface roughness and edge chipping is a key process measure in micro ultrasonic machining (Micro-USM) as an efficient process for micromachining of hard and brittle materials. Process parameters such as ultrasonic vibration amplitude, static load, type of tool material, type and size of abrasive particles and slurry concentration can influence the surface quality. How...
متن کاملAn Experimental Investigation on Surface Roughness and Edge Chipping in Micro Ultrasonic Machining
Surface quality including surface roughness and edge chipping is a key process measure in micro ultrasonic machining (Micro-USM) as an efficient process for micromachining of hard and brittle materials. Process parameters such as ultrasonic vibration amplitude, static load, type of tool material, type and size of abrasive particles and slurry concentration can influence the surface quality. How...
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Metal alloys have material properties that are very appealing for micro electro mechanical systems (MEMS), but present a challenge for process integration within a lithographic manufacturing sequence of the type used in the semiconductor industry. The batch-mode micro electrodischarge machining (μEDM) discussed here uses lithographically-fabricated electrode arrays with high density and high un...
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∗Department of Mechanical Systems and Design, Tohoku University 6-6-01 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan E-mail: [email protected] ∗∗Department of Mechanical Engineering, Faculty of Science and Technology, Keio University 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223-8522, Japan ∗∗∗Manufacturing Process Department, Faculty of Manufacturing Engineering, Universiti Teknikal Malay...
متن کاملHigh resolution micro ultrasonic machining for trimming 3D microstructures
This paper reports on the evaluation of a high resolution micro ultrasonic machining (HR-μUSM) process suitable for post fabrication trimming of complex 3D microstructures made from fused silica. Unlike conventional USM, the HR-μUSM process aims for low machining rates, providing high resolution and high surface quality. The machining rate is reduced by keeping the micro-tool tip at a fixed dis...
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ژورنال
عنوان ژورنال: Procedia CIRP
سال: 2018
ISSN: 2212-8271
DOI: 10.1016/j.procir.2017.12.076